|
There is an ongoing explosion of interest
in the development of MEMS (microelectromechanical systems) for
biomedical applications. In the most general sense, this technology
attempts to exploit and extend the fabrication techniques developed
for the microelectronics industry (also known as microchip, integrated
circuits, or IC industry) to add mechanical components, such as
beams, gears, diaphragms, and springs, to create miniature sensors
and actuators.
These devices are collectively referred to as transducers and are
comprised of microstructures with sizes that are often as small
as a few micrometers (microns), or more recently, in the nanometer
range. Over the course of the past decade, the term MEMS has become
generalized to refer to any number of miniature components that
are mechanical in nature, but were produced using microelectronics
fabrication (microfabrication) techniques. Therefore, it is common
to see references to MEMS in popular or trade literature that encompasses
biochemical sensors, optical components, and fluidic channels, etc.
Currently, it is accepted terminology that MEMS refers to miniature
components that are fabricated using a combination of techniques
that were originally borrowed from the microelectronics fabrication
industry, and then modified for the production of microstructures
or microsystems such as sensors and actuators. MEMS has also been
referred to as micromachines and microsystems. These terms are often
used interchangeably.
(More
on MEMS)
|
